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Brooks GP200 Metal-Sealed Pressure-Based Mass Flow Controller

Metal-sealed pressure-based gas mass flow controller for high-purity semiconductor and advanced process gas systems.

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The GP200 is a pressure-based mass flow controller designed for demanding high-purity gas delivery applications. Its differential-pressure architecture supports precise gas control across varying process conditions, including low-vapour-pressure gases.

Product Highlights

  • Pressure-based measurement and control rather than conventional thermal sensing.
  • Metal-sealed high-purity flow path.
  • Integrated monitoring and digital interface options.

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