The Brooks model 5800 series elastomer sealed analog mass flow meters and controllers accurately measures gas flows from below 3 sccm to 1,000 slpm.  The extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. Output can be 0 – 5 VDC, 1 – 5 VDC, 0 – 20 mA or 4 – 20 mA.  The 5800 series is composed of 5850/51/53, and 5860/61/63 E or I.