The Brooks model 5851EM metal sealed mass flow controller accurately measures and controls gas flows in the ultra-clean environments of 10 - 100 slpm.  Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions.

The Brooks model 5851i mass flow controller accurately measures and controls gas flows of 10 - 100 slpm.  Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions.  Selectable analog input/output 4 - 20 mA or 0 - 5 VDC.

The Brooks model 5853E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 100 - 1,000 slpm.  Brooks's extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions.

The Brooks model 5853i mass flow controller accurately measures and controls gas flows of 100 - 1,000 slpm.  Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions.  Selectable analog input/output 4 - 20 mA or 0 - 5 VDC

The Brooks model 5860E elastomer sealed analog mass flow meter accurately measures gas flows of 3 - 30,000 sccm.  Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions.  Output is 0 - 5 VDC.

The Brooks model 5860i elastomer sealed analog mass flow meter accurately measures gas flows of 3 - 30,000 sccm.  Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions.  Selectable analog output 4 - 20 mA or 0 - 5 VDC