The Brooks vaporizer system provides 100% vaporization and repeatable, uniform, particle-free films.  It can mix up to three fluid streams and is the only system robust enough to handle low vapor pressure and thermally sensitive fluids.  With a dynamic flow range of less than 10 grams/hr to greater than 10 kg/hr and Coriolis-based mass flow control, this system is truly unique.  The Brooks vaporizer system is superior to flash vaporizers and bubbler systems, and has been proven in CVD, MOCVD, ALD, PACVD and other advanced deposition applications.

The Brooks Instrument GF100 is a robust upgrade for standard high purity (HP) mass flow controllers, offering improved accuracy and cleanliness.  The GF100 is designed for long-term reliability with embedded diagnostics and automated zeroing to reduce maintenance for a lower cost of ownership.  The wetted flow path has a 10 Ra finish, there is a high visibility LCD display that shows flow and temperature.

The Brooks Instrument GF120 mass flow controller builds upon Brooks' leadership position in UHP digital mass flow controllers.  The wetted flow path has a 4 Ra finish and is SEMI F-20 compliant.  Multi gas/multi range (MG/MR) is a proprietary technology available on all Brooks GF Series MFCs.  MG/MR Technology allows the user to program the MFC for desired gas and flow range anywhere, anytime without removing the MFC from the gas panel.

The Brooks Instrument GF125 mass flow controller builds upon our leadership position in pressure transient insensitive (PTI) technology.  PTI Technology reduces the effect of pressure fluctuations on gas flow .  Wetted surface finish is 4 Ra and is SEMI F-20 compliant.  Multi gas/multi range (MG/MR) Technology allows the user to program the MFC for desired gas and flow range anywhere, anytime without removing the MFC from the gas panel.

Brooks QUANTIM Coriolis mass flow meter/controller provides superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid applications.  QUANTIM provides flow measurement and integral control, plus on-line density and temperature measurement all in one compact package.  Available with three tube sizes to match customer's flow measurement and control needs.  Available with NEMA 4X/IP65 housing and Class 1 Div 1 approved explosion proof body.

Brooks QUANTIM Coriolis mass flow meter/controller provides superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid applications.  QUANTIM provides flow measurement and integral control, plus on-line density and temperature measurement all in one compact package.  Available with three tube sizes to match customer's flow measurement and control needs.  Available with NEMA 4X/IP65 housing and Class 1 Div 1 approved explosion proof body.