The Brooks vaporizer system provides 100% vaporization and repeatable, uniform, particle-free films.  It can mix up to three fluid streams and is the only system robust enough to handle low vapor pressure and thermally sensitive fluids.  With a dynamic flow range of less than 10 grams/hr to greater than 10 kg/hr and Coriolis-based mass flow control, this system is truly unique.  The Brooks vaporizer system is superior to flash vaporizers and bubbler systems, and has been proven in CVD, MOCVD, ALD, PACVD and other advanced deposition applications.

The Brooks Instrument GF100 is a robust upgrade for standard high purity (HP) mass flow controllers, offering improved accuracy and cleanliness.  The GF100 is designed for long-term reliability with embedded diagnostics and automated zeroing to reduce maintenance for a lower cost of ownership.  The wetted flow path has a 10 Ra finish, there is a high visibility LCD display that shows flow and temperature.

The Brooks Instrument GF120 mass flow controller builds upon Brooks' leadership position in UHP digital mass flow controllers.  The wetted flow path has a 4 Ra finish and is SEMI F-20 compliant.  Multi gas/multi range (MG/MR) is a proprietary technology available on all Brooks GF Series MFCs.  MG/MR Technology allows the user to program the MFC for desired gas and flow range anywhere, anytime without removing the MFC from the gas panel.

The Brooks Instrument GF125 mass flow controller builds upon our leadership position in pressure transient insensitive (PTI) technology.  PTI Technology reduces the effect of pressure fluctuations on gas flow .  Wetted surface finish is 4 Ra and is SEMI F-20 compliant.  Multi gas/multi range (MG/MR) Technology allows the user to program the MFC for desired gas and flow range anywhere, anytime without removing the MFC from the gas panel.

The Brooks S122/C122/F122 series 2 inch stainless steel gauges were designed and developed for the demanding high-purity applications of the semiconductor industry.  With an accuracy of 1% of full scale, the 2 inch gauges offer a reliable and efficient way to monitor pressure locally.  This durable measuring device comes in a variety of process connections, pressure ranges (vacuum to 4,000 PSI) and socket orientations.

The Brooks IPS122 series 2 inch stainless steel indicating pressure switches provide a high-purity, precision pressure gauge and electronic switch with an adjustable pressure switch setpoint.  This compact 2 inch unit has the ability to operate lights or relays up to a maximum of 12 watts.  Available in a variety of pressure ranges and process connections, and cleaned and double bagged in a Class 100 environment, this device provides solid state switching for cleanroom and hazardous applications.