Gas Flow Calibration

At Trillium Measurement and Control we offer calibration and certification services for mass flow meters and controllers, variable area flow meters and other volumetric gas flow meters. Our factory trained personnel are capable of re-ranging, cleaning, modifying or refurbishing most Gas Mass Flow Meters or Controllers. We carry a large inventory of Brooks parts and complete units for quick turn-around times on repairs or re-ranging, and fast deliveries of MFC’s. Flow Ranges from below 3 SCCM to 500 SLPM using H2, Air, N2, Ar, He and others

Equipment Return Form 041